Data set information | |
Short name | Originaldokumentation von 'Fabrik\Silizium-Wafer-multi-DE-2000' |
Publication type | Undefined |
Link to digital file |
Data entry by | |
Time stamp (last saved) | 2020-09-15T08:56:48 |
Publication and ownership | |
UUID | 6591d744-1330-4d43-8048-69945c2ae81a |
Data set version | 02.44.152 |
Owner of data set |