| Data set information | |
| Short name | Originaldokumentation von 'Fabrik\Silizium-Wafer-mono-DE-2010' |
| Publication type | Undefined |
| Link to digital file | |
| Data entry by | |
| Time stamp (last saved) | 2020-09-15T08:56:48 |
| Publication and ownership | |
| UUID | b53e446f-5266-4628-bf23-aaba28105afd |
| Data set version | 02.44.152 |
| Owner of data set | |